The aim of this project is to correlate the point defect structure of Fe1-x
O to its mechanical, electrical and catalytic properties. Systematic stoichiometric variation of magnetron-sputtered Fe1-x
O thin films are investigated regarding structural analysis by transition electron microscopy (TEM) and X-ray absorption near edge structure spectroscopy (XANES), which can reveal the defect point defect structure caused by chemical variation. Following this, the defect structure can be correlated to mechanical properties such as fracture toughness, electrical resistivity, and the catalytic properties for possible future water-splitting applications.