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Publications of Tobias Beck

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Journal Article (1)

1.
Journal Article
Kauffmann, F.; Dehm, G.; Schier, V.; Schattke, A.; Beck, T.; Lang, S.; Arzt, E.: Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiNx coatings prepared by magnetron sputtering. Thin Solid Films 473 (1), pp. 114 - 122 (2005)
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