© Max-Planck-Institut für Eisenforschung GmbH

Design of MEMS based testing platforms

This project will aim at developing MEMS based nanoforce sensors with capacitive sensing capabilities. The nanoforce sensors will be further incorporated with in situ SEM and TEM small scale testing systems, for allowing simultaneous visualization of the deformation process during mechanical tests

Nanomechanical testing is an invaluable tool for understanding the fundamental deformation processes in advanced 1-D and 2-D materials such as nanowires and nanosheets. Standard strain gage-based load cells do not have the capability to capture loads with nanonewton resolution that is required for nanomechanical metrology. Also, given the large aspect ratio of such 1-D and 2-D materials, tensile testing is the favored mode of deformation. These stringent testing requirements of nanomechanics can be met only via MEMS based load-sensing platforms. 

Therefore, this project will aim at developing MEMS based nanoforce sensors with capacitive sensing capabilities. The nanoforce sensors will be further incorporated with in situ SEM and TEM small scale testing systems, for allowing simultaneous visualization of the deformation process during mechanical tests. A particular focus will be also to improve the bandwidth of electronics and support hardware for the nanoforce sensor, to allow high-speed force measurements.

FEM simulation of the MEMS based nanoforce sensor during mechanical test

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