Electron backscatter diffraction is an electron diffraction technique in scanning electron microscopy used to obtain information about crystallographic phase, crystal orientation and defect densities.
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ECCI is an imaging technique in scanning electron microscopy based on electron channelling applying a backscatter electron detector. It is used for direct observation of lattice defects, for example dislocations or stacking faults, close to the surface of bulk samples.
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Grain and phase boundaries are planar lattice defects where two crystal lattices of different orientation and/or different crystallographic structure meet. Grain boundaries strongly influence structural and functional properties of materials. Characterization can be done by various techniques for crystallograpic measurements.
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A (scanning) electron microscopy technique which measures crystal orientations on a regular grid by electron diffraction. The so-determined data are used to produce orientation or phase maps of the scanned area on the sample.
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EBSD-based orientation microscopy is by nature a 2-dimensional technique, revealing the microstructure existing close to the surface of the sample. By combining 2D-ORM with successive serial sectioning a 3D technique is developed. 3D microstructures are reconstructed from the individual sections by dedicated in-house software.
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XR-EBSD is a particular way to analyse EBSD patterns which allows measuring elastic distortions and residual stresses as well as very small rotations of a crystal lattice.
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