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Publications of Helmut Schönherr
All genres
Journal Article (2)
1.
Journal Article
518 (20), pp. 5796 - 5801 (2010)
Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin Solid Films 2.
Journal Article
518 (1), pp. 247 - 256 (2009)
A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin Solid Films