Applications of dynamical electron diffraction simulations in the SEM

Applications of dynamical electron diffraction simulations in the SEM

Electron backscatter diffraction patterns (EBSP) are intensively used for observation of microstructures and textures in the SEM. For most of these applications only the geometry and not the intensity distribution of these diffraction patterns is considered. In fact, EBSPs are created by heavily dynamic electron diffraction which makes the interpretation of the diffracted intensities difficult. The advent of software for realistic simulation of these patterns has changed this situation and the talk will discuss current and potential applications of the use of pattern intensity analysis. Under others, one example will deal with the measurement of the direction of the polar axis in GaP which has a non-centrosymmetric cubic crystal structure. Another example will discuss the possibility to determine the chirality of quartz crystals. The potential for structure determination from EBSD patterns will be discussed as well.

Dr. Aimo Winkelmann

Bruker Nano GmbH

Am Studio 2D

12489 Berlin

Phone +49 30 6709900
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Http Bruker Nano Analytics
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