![The AProLAM Project The AProLAM Project](/3893075/header_image-1549551958.jpg?t=eyJ3aWR0aCI6ODQ4LCJmaWxlX2V4dGVuc2lvbiI6ImpwZyIsIm9ial9pZCI6Mzg5MzA3NX0%3D--38982c47643f01d888c7e2bd46036bd2b11ef38f)
Publications of Helmut Schönherr
All genres
Journal Article (2)
1.
Journal Article
518 (20), pp. 5796 - 5801 (2010)
Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin Solid Films 2.
Journal Article
518 (1), pp. 247 - 256 (2009)
A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin Solid Films