Search results

Journal Article (2)

1.
Journal Article
Matoy, K.; Schönherr, H.; Detzel, T.; Dehm, G.: Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers. Thin Solid Films 518 (20), pp. 5796 - 5801 (2010)
2.
Journal Article
Matoy, K.; Schönherr, H.; Detzel, T.; Schöberl, T.; Pippan, R.; Motz, C.; Dehm, G.: A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin Solid Films 518 (1), pp. 247 - 256 (2009)
Go to Editor View