Publications of Tobias Beck

Kauffmann, F.; Dehm, G.; Schier, V.; Schattke, A.; Beck, T.; Lang, S.; Arzt, E.: Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiN_x coatings prepared by magnetron sputtering. Thin Solid Films 473 (1), pp. 114 - 122 (2005)