Publikationen von Helmut Schönherr

Matoy, K.; Schönherr, H.; Detzel, T.; Dehm, G.: Micron-sized fracture experiments on amorphous SiO_x films and SiO_x/SiN_x multi-layers. Thin Solid Films 518 (20), S. 5796 - 5801 (2010)

Matoy, K.; Schönherr, H.; Detzel, T.; Schöberl, T.; Pippan, R.; Motz, C.; Dehm, G.: A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films. Thin Solid Films 518 (1), S. 247 - 256 (2009)